AES

Advanced Equipment Systems

DELIVERING PROCESS SOLUTIONS

AES is a division of Air Liquide Electronics (ALE) focused on providing chemical and gas management solutions. We supply chemical and slurry blending and distribution systems, waste collection systems, chemical generation systems, gas distribution systems and factory control systems for the semiconductor, photovoltaic, medical device, and flat panel markets.

PRODUCTS

  • Chemical Dispense Systems

    ChemFlex
    ChemFlex IC
    ChemFlex Micro
    ChemFlex Nano

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  • Chemical Blending and Generation Systems

    ChemPrep Inline
    ChemPrep Batch
    ChemPrep NTM
    ChemGen

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  • Slurry Blending and Distribution Systems

    ChemFlex 3000 CMP
    ChemFlex CMP IC

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  • Bulk Chemical and Waste Management Systems

    Clean Coupling Booth (CCB) 

    Coupling Transfer Station (CTS)

    ChemStar Waste Collect 

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  • Gas Distribution, Blending, and Liquid Precursor Dispense Systems

    Fabstream III Gas Cabinets
    CANDI Precursor Systems
    Gas VMBs
    Gas Mixers

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  • Factory Control Systems

    Configurable Factory Controls

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