Gas Distribution, Blending, and Liquid Precursor Dispense Systems

Gas management systems safely move Electronic Specialty Gases from the supply cylinder or tank to the Points of Use. Air Liquide has systems designed for inert, toxic, corrosive, flammable, oxidizer and pyrophoric gases, as well as liquid precursors.

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The FabStream product family is designed to support the full range of Electronic Specialty Gas (ESG) requirements. FabStream offers innovations ranging from Reduced Purge Volume to All Vapor Phase to the first PLC controlled gas systems. The SaFlow low-cost gas cabinet, CANDI precursor dispense systems, Valve Manifold Boxes (VMB’s), and Gas Mixers complete the gas management product portfolio. With an install base of 3,000+ gas cabinet systems, Air Liquide is a proven industry leader capable of offering the partnership necessary for success.

APPLICATIONS

  • FabStream III Gas Cabinets
    Automated process gas delivery systems for high and low flow applications
  • FabStream III VMBs
    Valve manifold boxes designed to distribute specialty gases for optimized safety and operations
  • CANDI Liquid Precursor Dispense
    A continuous delivery system for advanced low vapor pressure liquid precursors
  • Gas Mixers
    For continuous, high-accuracy and high-flow-rate gas mixture generation

REFERENCE MATERIALS

Product Documentation