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About AES

DELIVERING PROCESS SOLUTIONS

AES is a division of Air Liquide Electronics (ALE) focused on providing chemical and gas management solutions. We supply chemical and slurry blending and distribution systems, waste collection systems, chemical generation systems, gas distribution systems and factory control systems for the semiconductor, photovoltaic, medical device, and flat panel markets.

OUR HISTORY

1985

1985

FSI International (FSI) of Chaska, MN enters the chemical management market with the introduction of the ChemFill chemical dispense products

1995

1995

FSI acquires Applied Chemical Solutions (ACS) of Hollister, CA and gains CMP slurry blend and dispense equipment capability

1997

1997

BOC Edwards acquires Systems Chemistry of Santa Clara, CA and enters the chemical management market as the main competitor of FSI in the US

1999

1999

BOC Edwards acquires FSI Chemical Management Division

2002

2002

BOC Edwards acquires Semco of Livermore, CA creating new OEM business focus; Chaska operations relocate to a new building in Chanhassen, MN

2005

2005

BOC Edwards consolidates all US manufacturing to Chanhassen, MN

2008

2008

Air Liquide Electronics US LP acquires Edwards Chemical Management Division, renamed the Chemical Equipment Division (CED)

2009

2009

CED renamed to Advanced Equipment Systems (AES)

2016

2016

AES opens a chemical equipment manufacturing facility in Taichung, Taiwan to serve the Asia region and expand the overall AES manufacturing capacity

Air Liquide Electronics Services

Air Liquide Electronics has over 3,000 employees and an on-site service presence at more than 50 customer facilities in Asia, Europe and the US to fuel progress and continually support the semiconductor, flat panel display, photovoltaic and electronic component industries.

As our customers continue to contend with the most complex process challenges, innovate, and push technology to new records, we develop differentiated solutions that cover all major stages of electronics manufacturing, including:

  • Electronics Advanced Materials for chemical vapor deposition (CVD) and atomic layer deposition (ALD)
  • Electronics Specialty Materials such as silane and halogen gases that are used in deposition processes as reactants, dopants and etchants
  • Ultra high purity Carrier Gases generated on-site or delivered in bulk
  • Analytical services to improve our customers’ process and production yields
  • Total Gas and Chemical Management services, enabling our customers to focus on their competencies while our experts handle their daily needs safely and cost effectively

We collaborate with leading semiconductor manufacturers, tool manufacturers (OEMs), and academics to bring materials solutions for the production challenges for the next generation devices.

About Our Corporate Parent

Air Liquide, a world leader in gases, technologies and services for Industry and Health, is present in 75 countries with approximately 66,400 employees and serves more than 3.8 million customers and patients. Oxygen, nitrogen and hydrogen are essential small molecules for life, matter and energy. They embody Air Liquide’s scientific territory and have been at the core of the company’s activities since its creation in 1902.