Chemical Dispense Systems

Automated systems designed to reliably transfer and dispense high-purity chemicals from the supply containers to the Points of Use (POUs)

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Chemical dispense systems are used to move chemical from one place to another. A simple system draws chemical from a drum and pumps it to a process tool. More complex systems may perform simultaneous operations, such as transferring chemical from a drum to a daytank while dispensing chemical from the daytank to the Points of Use (POUs). Air Liquide Electronics has a diverse portfolio of dispense products designed to meet a wide range of requirements. The systems can also be customized for unusual applications.

APPLICATIONS

ChemFlex
A unit well-suited for high-volume manufacturing with options for one, two or three engines, and both diaphragm and centrifugal pump configurations.
ChemFlex IC
A fully redundant design that houses a supply drum and daytank within the cabinet to minimize the required floor space.
ChemFlex Micro
A small-footprint unit that can be configured with redundant pumps.
ChemFlex Nano
A compact unit that is typically wall or rack mounted to supply a blender or low-usage application.