Slurry Blending and Distribution Systems

Slurry blend and dispense systems perform the same basic functions as chemical blend and dispense systems, but they have additional features and functionality to meet the unique requirements of CMP slurry handling. Slurry systems must agitate the slurry to maintain particle suspension, accurately blend slurries to the user specified recipe, and dispense slurry to the Points of Use without damaging the suspended particles. The products in the Air Liquide Electronics slurry portfolio are all designed to maintain the health of the slurry while offering different levels of capacity and redundancy. In addition, each system is configured to meet the application-specific needs of the slurry being handled.