AES is a division of Air Liquide Electronics (ALE) focused on providing chemical and gas management solutions. We supply chemical and slurry blending and distribution systems, waste collection systems, chemical generation systems, gas distribution systems and factory control systems for the semiconductor, photovoltaic, medical device, and flat panel markets.
PRODUCTS
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Chemical Dispense Systems
VIEW PRODUCTSChemFlex
ChemFlex IC
ChemFlex Micro
ChemFlex Nano -
Chemical Blending and Generation Systems
VIEW PRODUCTSChemPrep Inline
ChemPrep Batch
ChemPrep NTM
ChemGen -
Slurry Blending and Distribution Systems
VIEW PRODUCTSChemFlex 3000 CMP
ChemFlex CMP IC -
Bulk Chemical and Waste Management Systems
VIEW PRODUCTSClean Coupling Booth (CCB)
Coupling Transfer Station (CTS)
ChemStar Waste Collect
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Gas Distribution, Blending, and Liquid Precursor Dispense Systems
VIEW PRODUCTSFabstream III Gas Cabinets
CANDI Precursor Systems
Gas VMBs
Gas Mixers -
Factory Control Systems
VIEW PRODUCTSConfigurable Factory Controls
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